Mitigating residual stress in Cu metallization Journal Article uri icon

Overview

publication date

  • December 3, 2012

has restriction

  • closed

Date in CU Experts

  • November 5, 2020 2:39 AM

Full Author List

  • Murray CE; Jordan-Sweet J; Ryan ET; Toney MF

author count

  • 4

citation count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Additional Document Info

volume

  • 101

issue

  • 23

number

  • ARTN 231906