publication date
- September 1, 2003
Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study
Journal Article
Overview
has restriction
- closed
Date in CU Experts
- November 5, 2020 2:39 AM
Full Author List
- Grill A; Patel V; Rodbell KP; Huang E; Baklanov MR; Mogilnikov KP; Toney M; Kim HC
author count
- 8
citation count
- 99
published in
- Journal of Applied Physics Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0021-8979
Digital Object Identifier (DOI)
Additional Document Info
start page
- 3427
end page
- 3435
volume
- 94
issue
- 5