Porous low-k dielectrics: Material properties Conference Proceeding

Overview

CU Boulder Authors

• Toney, Michael Folsom

publication date

• August 18, 2002

Date in CU Experts

• November 5, 2020 2:39 AM

Full Author List

• Tyberg C; Huang E; Hedrick J; Simonyi E; Gates S; Cohen S; Malone K; Wickland H; Sankarapandian M; Toney M

Full Editor List

• Lin Q; Pearson RA; Hedrick JC

author count

• 15

citation count

• 3

published in

• ACS Symposium Series  Journal

presented at event

• Symposium on Polymers for Micro- and Nano-Electronics  Conference

Other Profiles

International Standard Serial Number (ISSN)

• 0097-6156

International Standard Book Number (ISBN) 10

• 0-8412-3857-X

Additional Document Info

start page

• 161

end page

• 172

volume

• 874