Formation of thin oxide films on room-temperature silicon (100) by exposure to a neutral beam of hyperthermal atomic and molecular oxygen Journal Article
Overview
publication date
- December 1, 1998
has restriction
- closed
Date in CU Experts
- October 25, 2020 12:35 PM
Full Author List
- Tagawa M; Ema T; Kinoshita H; Ohmae N; Umeno M; Minton TK
author count
- 6
citation count
- 18
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0021-4922
Digital Object Identifier (DOI)
Additional Document Info
start page
- L1455
end page
- L1457
volume
- 37
issue
- 12A