Formation of thin oxide films on room-temperature silicon (100) by exposure to a neutral beam of hyperthermal atomic and molecular oxygen Journal Article uri icon

Overview

publication date

  • December 1, 1998

has restriction

  • closed

Date in CU Experts

  • October 25, 2020 12:35 PM

Full Author List

  • Tagawa M; Ema T; Kinoshita H; Ohmae N; Umeno M; Minton TK

author count

  • 6

citation count

  • 18

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-4922

Additional Document Info

start page

  • L1455

end page

  • L1457

volume

  • 37

issue

  • 12A