Nanocrystalline silicon films obtained by plasma enhanced chemical vapor deposition under time-modulated-microwave-power discharge conditions Journal Article uri icon

Overview

publication date

  • January 1, 2002

has restriction

  • closed

Date in CU Experts

  • November 14, 2019 10:24 AM

Full Author List

  • Pevtsov AB; Feoktistov NA

author count

  • 2

citation count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 1063-7850

Additional Document Info

start page

  • 305

end page

  • 307

volume

  • 28

issue

  • 4