Numerical scale-up study of silicon deposition using 2D slit nozzle sources Journal Article uri icon

Overview

publication date

  • September 1, 1998

has restriction

  • hybrid

Date in CU Experts

  • August 13, 2019 1:03 AM

Full Author List

  • Ghen C; Boyd ID

author count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 1369-8001

Additional Document Info

start page

  • 141

end page

  • 152

volume

  • 1

issue

  • 2