The mechanism of HF/H₂O chemical etching of SiO₂ Journal Article

Overview

CU Boulder Authors

• Musgrave, Charles Bruce

publication date

• January 1, 2002

has restriction

• closed

Date in CU Experts

• May 29, 2019 3:44 AM

Full Author List

• Kang JK; Musgrave CB

author count

• 2

citation count

• 95

published in

• Journal of Chemical Physics  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0021-9606

Digital Object Identifier (DOI)

• https://doi.org/10.1063/1.1420729

Additional Document Info

start page

• 275

end page

• 280

volume

• 116

issue

• 1