Modeling copper diffusion in silicon oxide, nitride, and carbide Conference Proceeding uri icon

Overview

publication date

  • April 1, 2002

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Zubkov V; Han J; Sun G; Musgrave C; Aronowitz S

Full Editor List

  • Veteran JL; OMeara DL; Misra V; Ho PS

author count

  • 5

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0272-9172

International Standard Book Number (ISBN) 10

  • 1-55899-652-4

Additional Document Info

start page

  • 401

end page

  • 406

volume

  • 716