DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROMACHINED GLASS-BLOWN SPHERICAL RESONATOR WITH IN-SITU INTEGRATED SILICON ELECTRODES AND ALD TUNGSTEN INTERIOR COATING
Conference Proceeding
Overview
publication date
- January 18, 2015
Date in CU Experts
- April 2, 2016 1:55 AM
Full Author List
- Giner J; Gray JM; Gertsch J; Bright VM; Shkel AM
author count
- 5
citation count
- 7
published in
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 1084-6999
Additional Document Info
start page
- 805
end page
- 808