DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROMACHINED GLASS-BLOWN SPHERICAL RESONATOR WITH IN-SITU INTEGRATED SILICON ELECTRODES AND ALD TUNGSTEN INTERIOR COATING Conference Proceeding uri icon

Overview

publication date

  • January 18, 2015

Date in CU Experts

  • April 2, 2016 1:55 AM

Full Author List

  • Giner J; Gray JM; Gertsch J; Bright VM; Shkel AM

author count

  • 5

citation count

  • 7

Other Profiles

International Standard Serial Number (ISSN)

  • 1084-6999

Additional Document Info

start page

  • 805

end page

  • 808