Addresses issues of micro-electro-mechanical systems (MEMS) modeling, design, and fabrication. Emphasizes the design and fabrication of sensors and actuators due to significance of these devices in optics, medical instruments, navigation components, communications, and robotics. Department consent required.
instructor(s)
Bright, Victor Mark
Primary Instructor
- Fall 2018 / Fall 2019 / Fall 2020 / Fall 2021 / Fall 2022 / Fall 2024
