Effect of thermal annealing on the stiffness of an SU-8 torsional spring Conference Proceeding
Overview
publication date
- September 9, 2012
has restriction
- gold
Date in CU Experts
- October 27, 2017 2:53 AM
Full Author List
- Li Y; Kuehne S; Psychogiou D; Hierold C
Full Editor List
- Walczak R; Dziuban J
author count
- 4
citation count
- 2
published in
- Procedia Engineering Journal
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 1877-7058
Digital Object Identifier (DOI)
Additional Document Info
start page
- 1199
end page
- 1202
volume
- 47