POLYSILANES - PHOTOCHEMISTRY AND DEEP-UV LITHOGRAPHY Journal Article

Overview

CU Boulder Authors

• Michl, Josef

publication date

• July 1, 1989

has restriction

• closed

Date in CU Experts

• December 11, 2015 11:06 AM

Full Author List

• MILLER RD; WALLRAFF G; CLECAK N; SOORIYAKUMARAN R; MICHL J; KARATSU T; MCKINLEY AJ; KLINGENSMITH KA; DOWNING J

author count

• 9

citation count

• 30

published in

• Polymer Engineering and Science  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0032-3888

Digital Object Identifier (DOI)

• https://doi.org/10.1002/pen.760291311

Additional Document Info

start page

• 882

end page

• 886

volume

• 29

issue

• 13